Equipment

 
 
 
The SEM/FIB dual beam electron microscope combines the functionalities of a scanning electron microscope (SEM) with a focused ion beam (FIB). The SEM allows to image the surface topography of the sample, comprising energy dispersive X-ray (EDX) spectroscopic chemical analysis. The FIB technique allows to cut out various shapes out of the sample, including lamellas ready for analysis with various TEM  techniques. 
 
Parameters:
- Accelerating voltage: 1 - 30 keV
- Tungsten Gun, resolution ~10 nm
- EDX detector
- BSE, STEM detector
- Low vacuum & ESEM mode
 

 
Imaging: SEM or STEM
The scanning mode allows to image the surface topography, etched grains or the cross-section of the sample. The scanning transmission detector allows to verify the transparency of TEM samples prepared by FIB or to make overview photos of large areas of the TEM samples. 
 
Chemical analysis: EDX
It is possible to analyze the sample surface or cross-section: as point analyses, line analysis across interfaces or phase boundaries or to perform 2D mappings. 
 
Precise cutting, sputtering & 3D tomography: FIB
The Gaion gun allows to cut out an polish down to electron transparency TEM lamellas. The sample material can be either removed or platinum can be sputtered on the sample surface in a desired shape and depth / thickness.
3D Tomography can be performed by removing slices of the analyzed sample and acquiring subsequent images, which later can be reconstructed int a 3D photo-cube.

   



The transmission electron microscope is the most powerful imaging tool in materials science as it allows to directly observe the internal structure of the analyzed material down to the atomic scale. Identification of chemical elements as well as their distribution is performed with sub-nanometer resolution as point analysis, linear scans or 2D mappings using spectroscopy tools.
  
Parameters:
- Accelerating voltage: 60-200 keV
- High brightness X-FEG gun, point resolution ~ 1.36 Å
- STEM with HAADF detector
- In-column SUPER-EDX 4 sector detector 


Conventional TEM imaging: BF & DF
In Bright-field (BF) conventional TEM the image of the sample is formed with the direct beam. In Dark-field (DF) microscopy, the direct beam is excluded.
 
Atomic resolution TEM imaging: HRTEM
High-resolution transmission electron microscopy (HRTEM) is an imaging mode that allows to visualize the crystalline structure of a sample at atomic scale.
 
STEM imaging: HAADF
In the STEM mode the HAADF detector, also called the Z-contrast detector generates an image reflecting the qualitative element distribution in the sample: the higher the atomic number of the element present, the brighter the contrast of the respective area.
 
TEM Spectrosocpy: super-fast EDX mapping
The super-fast EDX with a 4 sector in-column detector enables to perform mappings within minutes instead of hour as the count number is in the range of kcps.